Application of Electrostatic Technology Semiconductor Industry 2018-04-20
In the semiconductor device production plant, due to the adsorption of dust on the chip, the yield of VLSI will be greatly reduced. Workers in production workshops wear clean work clothes. If the human body is electrostatically charged, dust and dirt are easily adsorbed. If these dust and dirt are brought to the operation site, the quality of the product will be affected, the performance of the product will deteriorate, and the yield will be greatly reduced. . If the radius of the adsorbed dust particles is larger than the line width, the thickness of the film is lower, and the product is most likely to be scrapped.